Concentration monitoring system CS-600F

temperaturemeasurementchemical

An optical fiber-based chemical concentration monitor designed to measure chemicals used in semiconductor manufacturing processes such as cleaning and etching. Measurements of high-temperature chemicals essential for cutting-edge wet processes can be achieved. Enabling quick, stable, and space-saving solutions, leading to the optimization and increased precision of chemical management. Stable measurement of high-temperature chemicals Due to superior optical systems and algorithmic procedures, it has become possible to obtain stable measurements of chemical solutions even under the conditions of high temperature (20−80℃) without the need for adjustments or further processing. Additionally, it does not require the operator to cool the chemicals. Up to six types of chemicals (chemicals or ranges) are supported Measurements of up to six types of chemicals (chemicals or ranges) are possible with a single monitor. Desired types of chemicals or ranges can be freely specified for measurement, allowing for a wide range of measurement needs. Stable measurement of high-temperature chemicals Due to superior optical systems and algorithmic procedures, it has become possible to obtain stable measurements of chemical solutions even under the conditions of high temperature (20−80℃) without the need for adjustments or further processing. Additionally, it does not require the operator to cool the chemicals. Up to six types of chemicals (chemicals or ranges) are supported Measurements of up to six types of chemicals (chemicals or ranges) are possible with a single monitor.