A specific resistance meter ideal for monitoring the purity of ultra-pure water used in cleaning processes.
It accurately measures ultra-pure water during processes thanks to its microprocessor integration. This contributes to purity monitoring of ultra-pure water used as the final cleaning water for silicon wafers and other applications.
Based on the temperature characteristics of ultra-pure water, the microprocessor calculates the temperature compensation coefficient and automatically converts it to a 25°C specific resistance.
By using a platinum temperature sensor (Pt1000Ω) as the temperature compensation element, it allows for high-precision temperature compensation within the range of 0 to 100°C.
Allowing for temperature compensation options such as pure water, ultra-pure water with impurities, and user-defined temperature compensation, enabling temperature compensation tailored to the liquid to be measured.