Thermal mass flow meter D700MG

massfor gasdigital

Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. HORIBA's propose the new pressure based MFC D700MG, the upper compatible model of the D500MG to support customer’s challenges. Features On-Tool Gas and Full Scale Configuration Change *Only EtherCAT Provide flexibility to process optimization 100ms Step-up Response & MFC-to-MFC deviation control Deliver high productivity and greater process performance MRMG functionality for small flow rate(Bin101 – Bin105) Provide flexibility to process requiring small flow rate Better Valve Shut-off and Corrosion Resistance by PFA nozzle Robustness with less particle risk reduce down time and optimize yield State Monitor Function Provide more internal data for smarter failure prediction Output items of state monitor function Flow/Pressure zero adjustment counts Valve drive counts Record of max/min P0,P1,P2 pressure Record of max/min Block temperature Total time over/below pressure spec. Total time over/below temperature spec. Total working time Total control time Total flow time (per calibration instance) Total flow rate (per calibration instance)