Thermal mass flow meter D700WR

massfor gasdigital

The D700WR installs a new restrictor designed specifically for a wide range control application with high accuracy performance based on the CRITERION™ technology. D700WR can control flow rate down to 0.1% of full scale range which helps users to optimize the flexibility of gas delivery system. For example, if the system installs multiple MFCs for high and low flow rate control, users can reduce the number of MFCs and use another MFC in the same position for a different purpose. FEATURES 0.1～100% wide range control & high accuracy for low flow Provide flexibility to process optimization ≤ 500ms Step-up Response Deliver high productivity and greater process performance Zero failure robust CIP pressue sensor Reduce down time and labor cost in high volume production 10x better valve shut-off and corrision resistance by PFA nozzle Robustness with less particle risk reduce down time and optimize yield State Monitor Function Provide more internal data for smarter failure prediction Output items of State monitor function Flow/Pressure zero adjustment counts Valve drive counts Record of max/min P0,P1,P2 pressure Record of max/min Block temperature Total time over/below pressure spec. Total time over/below temperature spec. Total working time Total control time Total flow time (per calibration instance) Total flow rate (per calibration instance)