Thermal mass flow meter SEC-Z700S

massfor gascompact

The SEC-Z700S Series is equipped with new developed thermal sensors and a pressure insensitive function for stable flow rate control. The on-board pressure measurement reduces the cost, size and complexity of gas delivery systems. A new high-performance function provides a simplified gas supply system. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations. The SEC-Z700S Series demonstrates high stability and controls the gas flow without effecting the upstream and downstream pressure fluctuations. Flow rate output, temperature and pressure readings are provided. Basic Features Multi Gas / Multi Range function. The gas type and full scale flow rate can be changed by the customer Stable control of the gas flow without effect by upstream and downstream pressure fluctuations On board Multi display Ultra clean design - metal diaphragm, all stainless SUS-316L and polished surface treatment (standard) Compact size Same fitting to fitting dimension up to 50 SLM Signal compatibility: EtherCAT, DeviceNet Model Key Features Warranty 1% Set Point high accuracy (Flow rate ≥5%) High repeatability (≤±0.15% Set Point/Flow rate ≥5%) Wide range control (0.5-100% Full Scale) Tunable response (300ms≦t≦1000ms) High operation temperature (15-60℃) Low seat leak performance (≤0.1% Full Scale/Bin#01-#06) High corrosion resistance design