Thermal mass flow splitter FS-3000

FS-3000 combines HORIBA STEC’s mass flow controller (MFC) and MuCube (Master controller). By controlling MFC from MuCube equipped with the HORIBA STEC’s proprietary control algorithm, FS-3000 achieves stable splitting control. The control algorithm realizes stable flow rate splitting control by controlling flow rate ratios, while controlling the pressure of the upper stream of FS-3000 using HORIBA STEC’s original control optimization technology. Furthermore, even when the splitting ratios are altered, the control algorithm realizes high-speed response to flow rate splitting. Improve Expandability, Maintenance Performance FS-3000 supports splitting up to 15 flow channels through high-speed signal processing. When MFC fails, FS-3000 can be repaired simply by replacing failed slave only. Flexible Response to Required Specifications FS-3000 supports a wide range of gases, including mixed gases. In addition, FS-3000 supports RS-485, DeviceNet as user interfaces.