Absolute pressure measurement is crucial for most of vacuum processes in various industries including Semiconductor, FPD, HDD, PV and Coating. A capacitance manometer determines the total pressure from the deformation of the diaphragm that occurs when a pressure difference is applied to both side of the diaphragm. The strong points of the capacitance manometer over other methods are:
•Higher precision
•Less gas dependence in pressure output
•Relatively resistant to corrosive gases
Features
Compact self heating design
Original signal processing method for accurate measurement
SUS316L diaphragm
Selectable from temperature-controlled (55, 100°C) or non-heating type
ONE PUSH ReZero
Power requirements +/-15VDC or 24VDC
CE & RoHS compliant