Thermal mass flow meter D700uF

for gasPFA

D700uF(Micro Flow) is designed for ≤ 5SCCM flow application. ​ ≤ 5SCCM flow control has been very critical in high aspect ratio process.​ Specialized components and newly developed in-house low flow standard allow high accuracy flow control down to 0.025SCCM. Down to 0.025SCCM flow control capability Precise tuning gas control, enhance process tunability ≤ 100ms Step-up Response & MFC-to-MFC deviation control​ Deliver high productivity and greater process performance​ In-House flow metrology Reliable performance from all manufactured products State Monitor Function Provide more internal data for smarter failure prediction Better Valve Shut-off and Corrosion Resistance by PFA nozzle​ Robustness with less particle risk reduce down time and optimize yield