Differential pressure flow meter D700T

massfor gas24 Vdc

D700T is the best performance pressure-insensitive mass flow module designed for critical semiconductor manufacturing process. D700T adapted the HORIBA CRITERION pressure-based flow measure and control technology to provide industry leading repeatable and accurate performance. In addition, uniqueness of D700T is utilizing a patented advanced flow control algorithm with twin valve structure which enables customer's gas delivery system to solve multiple challenges. ≤ 100 msec fast settling time across-the-board (Set to Set, Step up and Step down) Inlet and outlet pressure insensitive performance Advanced failure detection to diagnose pressure sensor shift, valve seat leak and flow accuracy change Within 0.15 %S.P. repeatability Best accuracy specification is within 0.45 %S.P.* (Standard: 0.8 %S.P.) Wider Operating Temperature Range (15-60 °C)