SHARPeR is a Eurostars project that aims at developing a new high accuracy automated metrology platform for extremely high quality optical components needed for example in synchrotron beamlines, EUV lithography systems and telescopes. Meter-scale X-ray mirrors will be characterized with a slope error accuracy better than 50nrad rms.
The system will include three main elements:
• A highly stable and repeatable motion platform with rotation and tip-tilt stages
• A high precision wavefront sensor with an absolute accuracy of λ/1000 rms
• An advanced stitching algorithm for high accuracy results
The new ultra-high precision Shack-Hartmann wavefront sensor is integrated in an optical head coupled with a dedicated motion platform to provide 2D slope/height maps. The surface under test can be oriented horizontally or vertically to match the actually used configuration. Customers can specify both longitudinal (scanning direction) and transversal travelling ranges to expand the range of characterization area. Optionally, rotation and tip-tilt axes can be added to the motion system. This enables the user to automatically flip the optical component under test without disturbing the measurement environment by manual interference.