Wafer metrology system MESO™

for semiconductors

MESO Metrology Solution MESO metrology system is a one-stop solution to many challenges in optical metrology. Shop floor measurements ensure quality control testing and in situ process control of your flat optics right next to the manufacturing line. A unique instrument allows to measure at several different wavelengths with no chromatic abberations and to characterize the whole range of your optics with no loss of resolution. MESO™ is packed with innovation: – LIFT-enhanced high wavefront sensing resolution – POP-patent pending procedure for the testing of (thin) plane parallel optics – Spot Tracker™ proprietary technology provides absolute measurement of tilt and wavefront. KEY FEATURES​ Insensitive to vibrations​ At-design wavelength testing​ Insensitive to reflections from sample back surface​​ ​ APPLICATIONS​ MESO is the perfect testing tool for the control of: Parallel Optics Screens Filters, dichroics Mirrors Beamsplitters Windows Substrates Corner cubes Crystals Rods, Disks Glass wafers Displays Machined surfaces Windshields Prisms Large lenses Optical systems Beam expanders ​KEY SPECS of MESO metrology system Horizontal or vertical integration Optical zoom from 1,5’’ (38,1mm) up to 6’’ (152mm) Testing wavelength from 405 nm to 820 nm 680 x 500 phase points resolution 27us minimum acquisition time KEY SPECS​ Touchscreen interface control Scripted testing procedures guide the user through all the steps Automated control of up to 4 embedded wavelengths​ Automated control of test diameter​ Complete automated test report​ ISO10110 standard compliance​​ Multiformat data export​