Single-sensor analyzer Semion

for plasma reactorprocessretarding field

The Semion Single Sensor is a Retarding Field Energy Analyser (RFEA). It is placed at any location inside a plasma reactor and measures the energy of ions hitting a surface using a single measurement sensor. This retarding field analyser (RFA) is a fundamental plasma diagnostic to measure the ion energy distribution function and also measures the Ion flux, negative ions, temperature and bias voltage (Vdc). The Semion system allows in situ process monitoring, confirmation of models, development of new processes and research applications in real time at the substrate location. The Semion, sometimes called a retarding potential analyser, measures the ion energy and produces the ion energy distribution function (IEDF), ion flux, negative ions, temperature and Vdc at the substrate position inside a plasma reactor. The Semion retarding field energy analyser (RFEA) is widely used in many sectors across industry and research, such as plasma etching, coatings, plasma sputtering, PECVD and ion beam. The Semion Single Sensor is key plasma diagnostic instrument that can confirm models, aid new processes development and experiments that use plasma, plasma tool design and plasma research. The Semion Single Sensor retarding field energy analyser consists of a replaceable button probe sensor mounted in a sensor holder which connects to a vacuum feed-through which is powered by a 19" rack mounted electronics unit.