Single-sensor characterization instrument Vertex

plasmaion energy distribution

The Vertex Single Sensor measures the ion energy distribution as a function of aspect ratio hitting a surface inside a plasma reactor. This unique plasma characterisation instrument can also measure the ion energy, ion flux and bias voltage. The angle of ions hitting the bottom of a feature can be determined from the ion energy distribution as a function of aspect ratio which allows users monitor the quality of the etch profile at a given location in the plasma reactor. The Vertex Single Sensor measures the ion energy distribution as a function of aspect ratio, ion energy, ion flux, negative ions and Vdc at a surface inside a plasma. The Vertex Single Sensor is increasingly used in many applications in industry and research, such as plasma etching, ion beams, and plasma sputtering for plasma characterisation and plasma interaction analysis. The Vertex Single Sensor saves the user valuable time in confirming models, developing new processes and in experiments that use plasma, plasma tool design and plasma research. The Vertex Single Sensor is housed in a 19" rack mounted electronics unit, vacuum feed-through, and a sensor holder located anywhere inside a plasma or beam chamber. The location can even be a RF or DC powered electrode and can use a replaceable Button Probe sensor. The electronics unit connects to a laptop or a PC and uses the Vertex intelligent software suite. The Vertex Single Sensor has a number of holder options ranging from 50mm to 450mm and will depend on the users application. Users can select a 50mm sensor and physically move the sensor to measure in different chamber locations.