Ratio measuring system Quantum

ion/neutral fractionfor plasma reactor

The Quantum energy resolved gridded quartz crystal microbalance is a unique instrument to measure the ratio of ions to neutrals hitting a surface inside a plasma reactor, sometimes called the ion neutral fraction. This cutting edge instrument also measures the deposition rate, ion energy, ion flux and bias voltage. The ratio between neutrals and ions arriving at a surface, be it biased or grounded is now measurable by this groundbreaking system. The Quantum Single Sensor measures the ion neutral fraction or the flux ionization fraction arriving at a surface inside a plasma reactor. It also measures the deposition rate, ion energy, ion flux and bias voltage at any location inside a plasma reactor. The Quantum Single Sensor or gridded quartz crystal microbalance is widely used in many sectors across industry and research, such as plasma deposition, coatings, plasma sputtering, PECVD, etching and ion beam. The Quantum Single Sensor provides the flux ionization fraction, a measurement which is vital in most plasma applications but so far has been very hard to achieve. Ionization ratios find applications in researching new processes, confirming new recipes and models and can be used in the development of new tools and plasma processes.