Langmuir probe Plato

plasma density

The Plato Probe is a planar Langmuir Probe designed to work in deposition plasmas when an insulating film is deposited on the probe surface. This deposition tolerant Langmuir Probe can remain inside a plasma reactor while aggressive insulating gasses are in use. The Plato Probe measures plasma parameters such as plasma density, ion current density and electron temperature in plasmas with high deposition rates, like plasma enhanced chemical vapour deposition (PEVCD). For many years it has been difficult to measure the parameters of plasma in high deposition environments. Impedans have developed a groundbreaking technology which measures the parameters of plasma, even when a thick insulating layer is deposited on the probe surface. The Plato Probe is a planar Langmuir Probe for deposition plasma when an insulating film is deposited on the probe surface. The Plato Probe is the first Langmuir probe on the market that can operate in plasmas with high deposition rates. A unique feature of the Plato Probe is its ability to measure accurately key plasma parameters through a deposited layer several microns thick. The deposition of insulating layers does not affect the accuracy of the probe measurement. The Plato Probe is a unique instrument enabling scientists to measure the plasma density and electron temperature of plasma including deposition plasma. The Plato Probe provides plasma parameter measurement in DC, RF, microwave, continuous and pulsed plasma.