Langmuir probe Plato Spatial

plasma density

The Plato Spatial Probe is a Langmuir probe for deposition plasma. It scans across the bulk of a plasma to measure the uniformity of plasma parameters at different locations. It is designed to work in deposition plasmas even when an insulating layer is deposited on the probe surface. The Plato Probe measures plasma parameters such as plasma density, ion current density and electron temperature at different locations across the plasma even when the plasma has a high deposition rate. It is now possible to measure the uniformity of plasma parameters in a plasma depositing an insulating layer. The Plato Spatial Probe comes complete with an automated linear drive system which measures the main parameters of plasma at different locations inside a plasma reactor. The Plato Spatial Probe is the first Langmuir probe on the market that can operate in a plasma with high deposition rates and key to its success is its ability to measure accurately the key plasma parameters through an insulating layer several microns thick. The deposition of insulating layers does not affect the accuracy of the probe's plasma characterisation.