Voltage measuring instrument Industrial Octiv Poly 2.0 | VI Probe

ACimpedanceRF

The Octiv VI probe system is an in-line RF voltage, current and phase angle measurement system. It can measure a single fundamental frequencies and its harmonics at 1% accuracy and 1μs time resolution. Each system has a drop down menu with a choice of 5 fundamental frequencies to choose from. It measures voltage, current, phase angle, impedance and harmonics and the measurements can be viewed from a PC or direct to the meter unit. The Octiv VI probe system allows users to choose a single fundamental frequency from a drop down menu of five and extract all the harmonic information of each parameters measured. The Octiv VI Probe is a single frequency impedance sensor which normally sits after the match unit. It is used to measure the load impedance in applications such as plasma processes. It monitors voltage, current and phase of a single fundamental frequency and its harmonics. The Octiv VI Probe is ideal for accurately monitoring single plasma systems. The Octiv VI is calibrated to five fundamental frequencies: 2MHz | 13.56MHz | 27.12MHz | 40.68MHz | 60MHz and has a power range from 0 to 12 kW.