The Octiv Poly VI Probe is a multi-frequency in-line RF voltage, current and phase measurement system. It can measure multiple fundamental frequencies and its harmonics simultaneously and has an accuracy of 1% with 1μs time resolution. The VI Probe can detect and measure up to 5 fundamental frequencies and all their components (Voltage, Current, Phase Angle and Harmonics) at the same time.
The VI probe measures voltage, current, phase, impedance and harmonics and the measurements can be viewed from a PC or direct to the meter unit.
The Octiv Poly system allows users to measure a number of fundamental frequency and extract all the harmonic information of each parameters measured simultaneously.
The Octiv Poly VI Probe is a precision power and impedance sensor which normally sits post-match unit. It is used to measure the load impedance in applications such as plasma processes. It monitors voltage, current and phase of multiple fundamental frequencies and their harmonics. The Octiv Poly VI Probe is ideal for accurately monitoring dual frequency and triple frequency plasma systems.
The Octiv Poly has a power range from 0 to 12kW and is calibrated at 5 different Frequencies: 2MHz | 13.56MHz | 27.12MHz | 40.68MHz | 60MHz. The system is frequency agile and can detect other frequency bands.
The Octiv Poly is a high precision, high resolution sensor and high speed data acquisition unit combined. The Octiv Poly is the only precision power and impedance sensor with micro second resolution in pulsed applications. The Octiv Poly uses unique patented VI probe technology, designed for reliable operation in simultaneous multi-frequency applications with agile frequency tuning.