Voltage measuring instrument Octiv Suite 2.0 VI Probe

ACimpedanceRF

The Octiv Suite RF diagnostic (VI Probe) is an in-line RF voltage, current, phase, harmonics and plasma diagnostic system. It can measure all the parameters of RF power, break them down to their individual components and reconstruct the waveform of multiple fundamental frequencies simultaneously. This cutting edge system can also measure plasma parameters such as ion flux by using the RF electrode as a sensor. The Octiv Suite is truly in a class of its own when it comes to power delivery into a plasma reactor. The Octiv Suite measures voltage, current, phase, impedance and harmonics and the measurements can be viewed from a PC or direct to the meter unit. The Octiv Suite RF diagnostic (VI Probe) system allows users to measure a number of fundamental frequencies and extract all the harmonic information of each parameter measured simultaneously while reconstructing multiple waveforms The Octiv Suite is a unique leading edge technology to allow scientists evaluate complex inter-dependencies of RF parameters in areas such as plasma process performance. The Octiv Suite measures and displays the complex waveform. The software extracts and analyses the key RF parameters such as voltage, current and phase of all the complex components that make up the waveform. The Octiv Suite RF diagnostic (VI Probe) can be used to diagnose plasma parameters such as ion flux, plasma resistance and non-linear sheath impedance. The Octiv Suite will characterise a non-linear load with multiple fundamental frequencies, high harmonic and intermodulation components.