Spectrometer Moduli | RF Spectrometer

Moduli | RF Spectrometer Non-invasive fault detection and chamber health monitoring The RF Spectrometer is a radio-frequency (RF) detector that directly monitors the electrical state of a plasma from outside the plasma chamber. This is designed for fault detection on production tools without the need for an in-line sensor in the RF path. It has been proven to detect air leaks, wafer displacement and other serious plasma faults. The RF Spectrometer is a radio-frequency (RF) detector that directly monitors the electrical state of a plasma from outside the plasma chamber. This is designed for fault detection on production tools without the need for an in-line sensor in the RF path. It has been proven to detect air leaks, wafer displacement and other serious plasma faults.