Exhibit with us
*mydirectindustry  
English
  1. Power Transmission - Mechanical components
  2. Actuator and Positioning System
  3. XY positioning stage
  4. IntelLiDrives, Inc.

XY stage XY-OF-UL-280x280+ACR260UT
rotary2-axisopen-frame

XY stage - XY-OF-UL-280x280+ACR260UT - IntelLiDrives, Inc. - rotary / 2-axis / open-frame
XY stage - XY-OF-UL-280x280+ACR260UT - IntelLiDrives, Inc. - rotary / 2-axis / open-frame
Add to favorites
Compare this product
 
Go to the IntelLiDrives, Inc. website for more information

Characteristics

Orientation
XY, rotary
Number of axes
2-axis
Other characteristics
open-frame, for wafer handling
Stroke

280 mm
(11.024 in)

Speed

400 mm/s, 800 mm/s

Description

Open-frame low profile XY-Rotary stages designed for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer from both sides.

VIDEO

Catalogs

No catalogs are available for this product.

See all of IntelLiDrives, Inc.‘s catalogs
Go to the IntelLiDrives, Inc. website for more information

Other IntelLiDrives, Inc. products

OPEN FRAME XY-ROTARY SYSTEMS

See all IntelLiDrives, Inc. products
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.
 Distributor list -