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  1. Power Transmission - Mechanical components
  2. Actuator and Positioning System
  3. XY positioning stage
  4. IntelLiDrives, Inc.

XY stage XYR-65-10X10-AUT-ACR-65AUT
rotarylinear servo-motorfor wafer handling

XY stage - XYR-65-10X10-AUT-ACR-65AUT - IntelLiDrives, Inc. - rotary / linear servo-motor / for wafer handling
XY stage - XYR-65-10X10-AUT-ACR-65AUT - IntelLiDrives, Inc. - rotary / linear servo-motor / for wafer handling
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Characteristics

Orientation
XY, rotary
Type
linear servo-motor
Other characteristics
for wafer handling
Stroke

10 mm
(0.394 in)

Speed

200 mm/s

Description

XY-Rotary stages with linear motors and direct torque motors designed with a low profile for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive linear motor drive provides sub-micron XY positioning and direct drive rotary stage assures sub-arcsec performance

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.