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  1. Power Transmission - Mechanical components
  2. Actuator and Positioning System
  3. 3-axis micro-positioning system
  4. IntelLiDrives, Inc.

3-axis micro-positioning system X100+Y100+PSR300MHS-ABS
multi-axislinearfor clean rooms

3-axis micro-positioning system
3-axis micro-positioning system
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Characteristics

Number of axes
3-axis, multi-axis
Features
linear
Applications
for clean rooms
Other characteristics
compact, high-resolution, precision, linear motor-driven, servo controlled
Load

10 kg
(22.05 lb)

Max.: 20 kg
(44.09 lb)

Min.: 10 kg
(22.05 lb)

Stroke

300 mm
(11.81 in)

Max.: 300 mm
(11.81 in)

Min.: 300 mm
(11.81 in)

Speed

1 m/s
(3.28 ft/s)

Max.: 2 m/s
(6.56 ft/s)

Min.: 1 m/s
(3.28 ft/s)

Description

XY TABLE WITH LINEAR MOTORS ROTARY TABLE DDR DIRECT DRIVE ROTARY XY travel 300x300 mm Rotation unlimited Absolute encoders Linear resolution 0.1 micron Rotary resolution 0.25 arc-sec

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XYZR and XYZR SYSTEMS

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.
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