for wafer inspection and metrology, for robots, multi-function, for laboratory applications, for the semiconductor industry, for clean rooms, for wafer handling, for the pharmaceutical industry, for scanners, for testing
Other characteristics
with DC motor, compact, ball screw, high-accuracy, linear motor-driven, high-resolution, precision, servo controlled, with stepper motor, USB, plug-and-play, large aperture, with controller
Repeatability
1 µm
Load
30 kg (66.14 lb)
Stroke
Min.: 100 mm (3.94 in)
Max.: 600 mm (23.62 in)
300 mm (11.81 in)
Speed
Min.: 10 mm/s
Max.: 200 mm/s
100,000 mm/s (328.08 ft/s)
Description
Open-frame XY stages designed with a low profile for a wide range of automated accurate positioning in microscope-based applications. The drive mechanism located on the side of the unit and offers a clear un-obstructed two axes aperture to enable light or objects to pass through the center of travel.
Travel 300x300 mm to $ 600x600 mm
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.