Portal positioning stage
XYZverticalmotorized

Portal positioning stage - IntelLiDrives, Inc. - XYZ / vertical / motorized
Portal positioning stage - IntelLiDrives, Inc. - XYZ / vertical / motorized
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Characteristics

Orientation
XYZ, vertical
Type
motorized, electromagnetically-driven
Number of axes
3-axis
Other characteristics
long-travel, precision, compact, industrial, high-speed, ball screw, for wafer handling, with motor encoder, low-profile, automatic, with controller, portal, with built-in encoder, universal
Stroke

Min.: 50 mm
(1.969 in)

Max.: 1,000 mm
(39.37 in)

Speed

200,000 mm/s
(656.17 ft/s)

Min.: 10 mm/s

Max.: 500 mm/s

Repeatability

Min.: 0.5 µm

Max.: 1 µm

Load

Min.: 1 kg
(2.2 lb)

Max.: 20 kg
(44.09 lb)

Description

Gantry style cartesian robots with large working areas. All moving axes located above work area. - XYZ Gantry 300 x 300 x 50 mm travel - Ball screw mechanism - Stepper or servo motor driven Options include: - larger or smaller travel stroke - precision grade - ball screw lead - motor type (stepper or servo/encoder) - rotary table installation Easy to program with VISUAL IMAC icon based controller. No need to write a single line of code!

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.