Infrared lamps placed under the tooling plate heat it up. The tooling plate has a square form with dimensions 100x100mm and can be made of any suitable material. It can also be prefabricated with custom openings for fixtures inside it. Tooling plate can be replaced together with the parts on it. This enables serial production. Nitrogen flow blows from the chamber bottom against the tooling plate and thus cools it down. The chamber itself is air cooled.
Process environment - nitrogen, formic acid
Maximum temperature - 350°C
Heating area - 100 x 100 mm
Heating plate - removable: graphite, aluminum, etc.
Clearance above heating plate - 35 mm
Heat up / cool down ramp - 120-150°C/min
Control deviation - +/- 0.5°C
Heating elements - 4x infrared heating lamps
Heating control - common for all heaters
Cooling of heating plate - nitrogen flow
Temperature measurement - 1x fixed and 2x freely positional thermocouple K-Type
Pressure measurement - integrated pressure transmitter
Maximum vacuum - 5x10-2 mbar
Formic acid bubbler - 40 ml container, integrated in front panel
Cooling of chamber body - air cooling
Lid viewing port - 34 mm
Display - 7" LCD with touch screen
PC Software - process logging, recipe transfer, etc.
User interface - remote control over relay I/Os
Dimensions - 330 mm(W) x 300 mm(D) x 443 mm(H) with open lid
Weight - 12 kg
Power supply - 1 phase / 190-240V, 50/60 Hz
Heating in vacuum and inert gas, Power semiconductors on heat sinks, Flip chip reflow, Melting of bumps, High intensity LED attach, Sealing of hermetic packages, Photovoltaic cell assembly, Die attach, Sintering of printed copper films,