SCARA robot IWH Series 1for wafer handling
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Characteristics
- Type
- SCARA
- Function
- for wafer handling
- Payload
Min.: 0 kg
(0 lb)Max.: 1 kg
(2.205 lb)- Repeatability
0.02 mm
(0.0008 in)
Description
Series 1 robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes.
Characteristics:
-Excellent strucutural rigidity
-Maximum reliability and precision
-Top mounted (TA) or bottom mounted (BA) versions available
-Customized designs
-Absolute or incremental encoder
-Seamless integration with prealigner, linear track and other periphal
-Including "Standard" or "Advanced" Hard- & Software
-ISO 1 clean-room environment compatible
-Made in Germany
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.