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SCARA robot IWH Series 1
for wafer handling

SCARA robot - IWH Series 1 - isel Germany - for wafer handling

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SCARA robot - IWH Series 1 - isel Germany - for wafer handling - image - 5

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Go to the isel Germany website for more information

Characteristics

Type

SCARA

Function

for wafer handling

Payload

Min.: 0 kg
(0 lb)

Max.: 1 kg
(2.205 lb)

Repeatability

0.02 mm
(0.0008 in)

Description

Series 1 robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes. Characteristics: -Excellent strucutural rigidity -Maximum reliability and precision -Top mounted (TA) or bottom mounted (BA) versions available -Customized designs -Absolute or incremental encoder -Seamless integration with prealigner, linear track and other periphal -Including "Standard" or "Advanced" Hard- & Software -ISO 1 clean-room environment compatible -Made in Germany