Bellows pump CFD
waterammoniafor hydrogen

Bellows pump - CFD  - IWAKI Europe GmbH - water / ammonia / for hydrogen
Bellows pump - CFD  - IWAKI Europe GmbH - water / ammonia / for hydrogen
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Characteristics

Technology
bellows
Fluid
water, ammonia, for hydrogen
Operation
electric
Mobility
stationary
Domain
chemical, for the semiconductor industry
Applications
handling, high-pressure, metering, distribution, for precision applications
Material
PTFE, PFA
Protection level
chemical-resistant
Pressure

Min.: 0.05 MPa

Max.: 0.3 MPa

Fluid temperature

Min.: 20 °C
(68 °F)

Max.: 60 °C
(140 °F)

Weight

1.1 kg, 1.2 kg, 1.5 kg
(2.43 lb, 2.65 lb, 3.31 lb)

Description

This chemical fluid dispensing pump (CFD) is designed to handle wafer liquid of enhanced purity. Chemicals with a high vapor pressure like ammonia water and hydrogen peroxide can be also transferred. By the use fluoro plastics a high purity and a superior chemical resistance are ensured. The stroke lenght setting in addition with the stroke rate cover a wide range. The accumulation of particles is avoided by the PFA hose connections.

Catalogs

Serie CFD
Serie CFD
12 Pages
FW/-H
FW/-H
12 Pages
Serie FA
Serie FA
12 Pages
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.