Bellows pump FLP

for chemicalspneumaticstationary

Low Pulsation The position of the bellows is constantly monitored via the laser displacement sensors and proximity switches. The pump itself reduces pulsation without any additional equipment because the controller determines the appropriate amount of phase shift required to move the bellows left and right via an electromagnetic valve. Reduced Sensors External sensors are not needed since the pumps phase control of the bellows depends entirely on signals from the laser and proximity sensors included in the design. High Pressure The optimum bellows movement increases sustained pressure capability, maintaining stable discharge capacity and pressure under frequent load changes, especially in single wafer processing. Safe Design A welded bellows structure prevents liquid leakage. Even if the bellows is damaged, the built-in leak sensors will detect and provide feedback to ensure safe operation.