Measurement software CompleteEASE

mappingautomated

The next generation of ellipsometry software has arrived with CompleteEASE®, our revolutionary new software for Woollam ellipsometers. It’s easier than ever to use, and with the world-class quality you’ve come to expect from Woollam Company. CompleteEASE is included with M-2000, RC2, iSE, theta-SE, and alpha-SE systems. CompleteEASE® is an all-inclusive software package to handle all your ellipsometry requirements. Conveniently measure the uniformity of your samples with automated sample mapping. Collect in-situ data with spectroscopic ellipsometry on your process chamber or with add-on temperature control stage or liquid cell. All your data acquisition needs are combined into one easy-to-use software package. Create your own recipes to collect data, automate mapping and analyze your samples – contained in one step. Convenience and simplicity combine for push-button operation. CompleteEASE® includes built-in models covering a wide range of typical samples. Built-in models conveniently describe how to process the data to determine thin film properties. CompleteEASE also includes over 400 material files and dispersion equations to approach a wide variety of thin films – from dielectrics and organics to semiconductors and metals. The CompleteEASE Thickness Pre-Fit quickly and automatically finds the best thickness to match the data using a special patented algorithm. Eliminate the guesswork when nominal film thickness is unknown. The B-spline layer was developed in CompleteEASE as an alternative to direct fits or oscillator models.