Semiconductor Single crystal ingot Rolling and grinding integrated machine
Single crystal ingot Rolling and grinding integrated machine is a kind of domestic initial integrated device for grinding outer cylinder and orientation edge (V-notch) of semiconductor mono-crystalline silicon ingot. The equipment integrates the function of two different processing equipments which completes grinding outer cylinder and orientation edge(V-notch), respectively. The ingot ranged from 2 inches to 8 inches in diameter can be processed. Meanwhile, the machine has the ability of detecting -110,100,111-three crystal surface. The ingot processed by the machine mainly applied in the field of semiconductor integrated circuit. This equipment can meet the needs of assembly line production with intelligence, integration & automation in modern shop.