Abstract:(krypton 85) decay produces rays that are absorbed by the anode as they pass through it. As a result, the ray intensity after penetrating the polar plate decreases to a certain extent compared with the incident ray intensity...
1)It has a real-time and reliable self-checking mechanism.
2)Real-time display of thickness variation trends in horizontal and vertical planes. The polar transverse scan images are adjustable in group 0-30. The broadband electrodes are displayed in mm horizontally, and the process control line can be displayed in the scan chart. Graphic curves and histograms are optional.
3)The display interface can be customized, including real-time scanning map, horizontal trend map, vertical trend map, original waveform map, coating area edge thickness map, etc. Up to three can be customized and displayed at the same time.
4)It has the function of automatic edge finding to improve the scanning efficiency.
5)It can output polar measurement data for communication with coater equipment to realize real-time online feedback and compensation.
6)Push-pull door with sensor, when the door opens, the scanner returns to the origin.
7)Quality reports can be generated according to batch film volume numbers, including the mean, maximum, minimum, sigma, CPK of the current volume.
8)The software has the function of memory of model parameters. Once any model is set, it will be convenient to reset the parameters in the future.
9)MES system can be communicated to facilitate user production information management.
10)Real-time monitoring and recording function of voltage, current and temperature of X-ray tube