- Robotics - Automation - Industrial IT
- Industrial Robotics
- Articulated robot
- Kawasaki Robotics GmbH
Articulated robot TTS series4-axis5-axishandling
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Characteristics
- Type
- articulated
- Number of axes
- 4-axis, 5-axis
- Function
- handling
- Mounting
- floor-mounted
- Application domain
- for clean rooms
- Other characteristics
- high-speed, high-precision
- Payload
0.7 kg
(1.543 lb)- Reach
1,066 mm
(41.97 in)- Repeatability
0.1 mm
(0.0039 in)
Description
The TTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision. In addition, its rigid telescopic mechanism delivers high-speed handling in high and low positions.
The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.
Applications
Silicon Wafer Handling
Catalogs
Clean Robot NTS, TTS series
2 Pages
Other Kawasaki Robotics GmbH products
Wafer Transfer Robots
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.