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Optical inspection machine Puma™ series
for patterned wafersfor the electronics industrydefect

Optical inspection machine - Puma™ series - KLA Corporation - for patterned wafers / for the electronics industry / defect
Optical inspection machine - Puma™ series - KLA Corporation - for patterned wafers / for the electronics industry / defect
Optical inspection machine - Puma™ series - KLA Corporation - for patterned wafers / for the electronics industry / defect - image - 2
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Characteristics

Technology
optical
Applications
for patterned wafers
Sector
for the electronics industry
Other characteristics
defect, high-speed

Description

Laser Scanning Patterned Wafer Defect Inspection Systems The Puma™ 9980 laser scanning inspection system incorporates multiple sensitivity and speed enhancements that enable capture of critical defects of interest (DOI) at throughputs required for high volume manufacturing for 1Xnm advanced logic and advanced DRAM and 3D NAND memory devices. Part of a portfolio of advanced wafer defect inspection and review tools, the Puma 9980 provides the highest throughput solution for production ramp monitoring by enhancing capture of defect types on advanced patterning layers. The Puma 9980 incorporates NanoPoint™ design-aware capability, which produces more actionable inspection results through increased defect sensitivity, improved systematic nuisance binning and tightened defect coordinate accuracy. Line monitor, Tool monitor, Tool qualification

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