Temperature measurement system SensArray® automatictool
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Characteristics
- Measured physical value
- temperature
- Operating mode
- automatic
- Measured material
- tool
Description
In Situ Temperature Measurement Automation Package
The SensArray® Automation package provides fast automated collection of process tool chamber temperature measurements. The package includes an overhead track (OHT) compatible FOUP, automation station, system automation controller and office PC software seat components. SensArray FOUPs can be processed the same way as any production FOUP, with direct data porting to SPC charts. SensArray Automation provides productivity enhancements resulting from gains in process tool availability, more efficient use of engineering resources and centralized data storage in the fab’s MES database.
Applications
Process development, Process qualification, Process tool monitoring, Process tool qualification, Chamber matching, Process tool matching
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SensArray
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.