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Optical measuring system Therma-Probe® 680XP

optical measuring system
optical measuring system
optical measuring system
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Characteristics

Technology
optical

Description

Implant Metrology Systems The Therma-Probe® 680XP ion implant/anneal metrology system enables inline dose monitoring for the 2Xnm/1Xnm design nodes. The Therma-Probe 680XP produces critical process information about ion implant dose and profile, implant and anneal uniformity and end of range damage. In addition, the Therma-Probe 680XP system’s high resolution micro uniformity maps provide fingerprinting capability for implant and anneal process development. Applications Process monitor, Tool monitor

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