The Alpha-Step D-500 stylus profiler supports 2D measurements of step height, roughness, bow and stress. The innovative optical lever sensor technology offers high resolution measurements, large vertical range and low force measurement capability.
An advantage of the stylus measurement technique is that it is a direct measurement, independent of material properties. Adjustable force and choice of stylus enable accurate measurements of a wide variety of structures and materials. This enables quantification of your process to determine the amount of material added or removed, plus any changes in structure by measuring roughness and stress.
Zoomed in image of solar cell roughness
Features
Step Height: Nanometers to 1200µm
Low Force: 0.03 to 15mg
Video: 5MP high-resolution color camera
Keystone Correction: Removes distortion due to side view optics
Arc Correction: Removes error due to arc motion of the stylus
Compact Size: Smallest system footprint for a benchtop stylus profiler
Software: User friendly software interface
Graph showing step height measurements
Applications
Step Height: 2D step height
Texture: 2D roughness and waviness
Form: 2D bow and shape
Stress: 2D thin film stress