Optical profilometer Alpha-Step® D-600

3Dstylusroughness

The Alpha-Step D-600 stylus profiler supports 2D and 3D surface measurements of step heights and roughness, plus 2D bow and stress. The stylus profiler’s innovative optical lever sensor technology offers high resolution measurements, large vertical range and low force measurement capability. An advantage of the stylus measurement technique is that it is a direct measurement, independent of material properties. Adjustable force and choice of stylus enable accurate measurements of a wide variety of structures and materials. This stylus measurement option enables quantification of your process to determine the amount of material added or removed, plus any changes in structure by measuring roughness and stress. • Step Height: Nanometers to 1200µm • Low Force: 0.03 to 15mg • Video: 5MP high-resolution color camera • Keystone Correction: Removes distortion due to side view optics • Arc Correction: Removes error due to arc motion of the stylus • Compact Size: Small system footprint • Software: User friendly software interface Applications • Step Height: 2D and 3D step height • Texture: 2D and 3D roughness and waviness • Form: 2D bow and shape • Stress: 2D thin film stress