3D profilometer Tencor™ P-170

stylusroughnessbenchtop

The Tencor P-170 is a cassette-to-cassette profiler featuring the P-17’s industry leading benchtop system measurement performance and the HRP®-260’s production proven handler. This combination provides a low cost of ownership solution for a handler-based system serving the semiconductor, compound semiconductor and related industries. The Tencor P-170 supports 2D and 3D measurements of step height, roughness, bow, and stress for scans up to 200mm without stitching. Excellent measurement stability is achieved with the combination of the UltraLite® sensor, constant force control and an ultra-flat scanning stage. Recipe setup is fast and easy with point-and-click stage controls, top and side view optics and a high-resolution camera with optical zoom. The Tencor P-170 supports 2D and 3D measurements, with a variety of filtering, leveling, and data analysis algorithms available to quantify the surface topography. Fully automated measurements are achieved with automated wafer handling, pattern recognition, sequencing and feature detection. • Step height: Nanometers to 1000µm • Low force with constant force control: 0.03 to 50mg • Scan full diameter of the sample without stitching • Video: 5MP high-resolution color camera • Arc correction: Removes error due to arc motion of the stylus • Software: Easy-to-use software interface • Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM • Wafer handler: Automatically loads 75mm through 200mm opaque (e.g., silicon) and transparent (e.g., sapphire) samples Applications • Step height: 2D and 3D step height • Texture: 2D and 3D roughness and waviness