Optical profilometer Zeta™-388

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The Zeta™-388 non-contact profiler provides 3D metrology and imaging capability, combined with an integrated isolation table and a cassette-to-cassette wafer handling system for fully automated measurements. The system is powered by ZDot™ technology, which simultaneously collects high-resolution 3D data and a True Color infinite focus image. The Zeta-388 supports both R&D and production environments with Multi-Mode optics, easy-to-use software, a low cost of ownership, and SECS/GEM communications. The Zeta-388 optical profiler is a non-contact, 3D surface topography measurement system. The Zeta-388 builds on the capability of the Zeta-300 with the addition of a cassette-to-cassette handler for fully automated measurements. The system is powered by patented ZDot technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, smooth to rough texture, and step heights from nanometer to millimeters. The Zeta-388 automated optical metrology system integrates six different optical metrology technologies in one configurable and easy-to-use system. ZDot measurement mode simultaneously collects a high-resolution 3D scan and a True Color infinite focus image. Other 3D measurement techniques include white light interferometry, Nomarski interference contrast microscopy, and shearing interferometry. Film thickness can be measured with ZDot or an integrated broadband reflectometer. The Zeta-388 is also a high-end microscope that can be used for sample review or automated defect inspection.