Optical profilometer Tencor™ P-17

3Dstylusroughness

The Tencor P-17 is an eighth generation benchtop stylus profiler, built on over 40 years of surface metrology experience. This industry leading system supports 2D and 3D step height measurement, roughness, bow, and stress for scans up to 200mm without stitching. Excellent measurement stability is achieved with the combination of an UltraLite® sensor, constant force control and an ultra-flat scanning stage. Recipe setup is fast and easy with point-and-click stage controls, top and side view optics and a high-resolution camera with optical zoom. The Tencor P-17 stylus profilometer supports 2D or 3D measurements, with a variety of filtering, leveling and analysis algorithms to quantify the surface topography. Fully automated measurements are achieved with pattern recognition, sequencing and feature detection. • Step height: Nanometers to 1000µm • Low force with constant force control: 0.03 to 50mg • Scan full diameter of the sample without stitching • Video: 5MP high-resolution color camera • Arc correction: Removes error due to arc motion of the stylus • Software: Easy-to-use software interface • Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM Applications • Step height: 2D and 3D step height • Texture: 2D and 3D roughness and waviness • Form: 2D and 3D bow and shape • Stress: 2D and 3D thin film stress • Defect review: 2D and 3D defect surface topography