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Optical profilometer Alpha-Step D-500
3Dstylusroughness

Optical profilometer - Alpha-Step D-500 - KLA Corporation - 3D / stylus / roughness
Optical profilometer - Alpha-Step D-500 - KLA Corporation - 3D / stylus / roughness
Optical profilometer - Alpha-Step D-500 - KLA Corporation - 3D / stylus / roughness - image - 2
Optical profilometer - Alpha-Step D-500 - KLA Corporation - 3D / stylus / roughness - image - 3
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Characteristics

Technology
optical, 3D, stylus
Function
roughness
Domain
industrial
Configuration
benchtop

Description

The Alpha-Step D-500 stylus profiler supports 2D measurements of step height, roughness, bow and stress. The innovative optical lever sensor technology offers high resolution measurements, large vertical range and low force measurement capability. An advantage of the stylus measurement technique is that it is a direct measurement, independent of material properties. Adjustable force and choice of stylus enable accurate measurements of a wide variety of structures and materials. This enables quantification of your process to determine the amount of material added or removed, plus any changes in structure by measuring roughness and stress. Zoomed in image of solar cell roughness Features Step Height: Nanometers to 1200µm Low Force: 0.03 to 15mg Video: 5MP high-resolution color camera Keystone Correction: Removes distortion due to side view optics Arc Correction: Removes error due to arc motion of the stylus Compact Size: Smallest system footprint for a benchtop stylus profiler Software: User friendly software interface Graph showing step height measurements Applications Step Height: 2D step height Texture: 2D roughness and waviness Form: 2D bow and shape Stress: 2D thin film stress

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