Optical inspection system FlashScan®automaticfor defect detectionfor the electronics industry
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Characteristics
- Technology
- optical
- Operational mode
- automatic
- Type
- for defect detection
- Applications
- for the electronics industry
Description
Reticle Blank Defect Inspection Systems
The FlashScan® 211 mask blank defect inspection system supports mask shops and blank manufacturers in meeting mask blank defect requirements for optical and EUV lithography applications. The FlashScan 211 system pairs its high sensitivity with unparalleled inspection speed and automatic defect dispositioning, reducing the time to results for a wide range of applications.
Applications
Mask blank manufacturing, Mask blank qualification, Reticle process control, Reticle process equipment monitoring
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.