Optical profilometer Zeta™-20

3Dwhite light interferometryfor semiconductors

The Zeta-20 benchtop optical profiler is a non-contact, 3D surface topography measurement system. The system is powered by patented ZDot™ technology and Multi-Mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, smooth to rough texture, and step heights from nanometers to millimeters. The Zeta-20 integrates six different optical metrology technologies in one configurable and easy-to-use system. ZDot™ measurement mode simultaneously collects a high-resolution 3D scan and a True Color infinite focus image. Other 3D measurement techniques include white light interferometry, Nomarski interference contrast microscopy, and shearing interferometry. Film thickness can be measured with ZDot or an integrated broadband reflectometer. The Zeta-20 is also a high-end microscope that can be used for sample review or automated defect inspection. The Zeta-20 supports both R&D and production environments by providing comprehensive step height, roughness, and film thickness measurements, and defect inspection capability. Applications Step height: 3D step height from nanometers to millimeters Texture: 3D roughness and waviness on smooth to very rough surfaces Form: 3D bow and shape Stress: 2D thin film stress Film thickness: transparent film thickness from 30nm to 100µm Defect inspection: capture defects greater than 1µm Defect review: KLARF files are used to navigate to defects to measure 3D surface topography or scribe defect locations