Mass flow controller 5100

for gasstainless steelanalog

■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. ■Flow range：1SCCM～20SLM ■Accuracy：±1%F.S. Metal seals. Control of minute flows avaiable from F.S.1SCCM by N₂ conversion. Reduced dead volume thanks to the diaphragm seat valve. Applications ・Air sampling ・Analyzer component ・Bioreactor ・Biotechnological process ・Burn control ・CCFL manufacturing ・Chamber pressure control ・Chemical process ・Environment monitoring ・Electronic device manufacturing ・Food production ・Fuel cell testing ・Fermentation process ・Gas blending ・Gas distribution ・Gas flow monitoring ・Gas generation ・Industrial furnace ・Leak testing ・Pharmaceutical process ・Pollution monitoring ・Process flow control ・R&D ・Solar power element manufacturing ・Secondary calibration reference ・Semiconductor process ・Surface treatment process ・Thermal flame spray ・Thin film manufacturing ・Vapor deposition