■Applicable gas:N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range:10SCCM~100SLM
■Accuracy:±1~1.5%F.S.
Wide varieties of flow range avaiable from F.S.10SCCM to F.S.100SLM by N₂ conversion.
Easy operation with display.
・Instant and totalized flow indication.
・Upper or lower alarm settintg.
RS485 communication.
0-5VDC Input/output signal(4-20mA switchable).