Mass flow sensor 3810S

volumefor liquidsgas

The mass flow controllers and meters, which measure the mass flow rate, are less influenced by the temperature and pressure as compared with mechanical flow meters and valves, and can electrically exchange information about the flow rate. They are used in a wide range of processes and equipment in the fields where high levels of accuracy, repeatability, responsiveness and cost effectiveness are required, such as semiconductors, optic fibers, various analyses, fuel cells, liquid crystal, organic electroluminescence, biotechnology, foods, environmental measurement, combustion gas control, plant facilities and examination equipment. ■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. ■Flow range：10SCCM～50SLM ■Accuracy：±3～5%F.S.