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Thermal mass flow controller 366 series for gasfor airfor nitrogen
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Characteristics
- Technology
- thermal mass
- Fluid
- for gas, for air, for nitrogen, for compressed air, for oxygen, for sour gas
- Other characteristics
- compact, industrial, stainless steel, for low flow rates, for OEM, cost-effective, for high flow rates
- Output
- analog
- Flow rate
Max.: 100 l/min
(26.41721 us gal/min)Min.: 0 l/min
(0 us gal/min)- Pressure
Max.: 300,000 Pa
(43.5 psi)Min.: 50,000 Pa
(7.3 psi)
Description
■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：10SCCM～100SLM
■Accuracy：±1～1.5%F.S.
Wide varieties of flow range avaiable from F.S.10SCCM to F.S.100SLM by N₂ conversion.
CE
Catalogs
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.