•Electric PT Pump
Enables digital control of dispensing volume fine adjustment
and flow settings.
•Air Operated PT Pump
Air cylinder operated type of Tubephragm pump is now available.
Features
Employs a PT (Parallel Tubephragm) pump configuration that combines Koganei’s unique 8-shaped cross sectioned tube with bellows.
• - There is no sliding portion, so generation of particles due to pump operation is almost non-existent.
• - Sach as replacement of syringe pump seal and other periodic maintenance is unnecessary.
• - Structure allows very little liquid chemical residues, preventing gelling of photoresist material.
• - Structured for no ingress of outside air, crystallization of electrolytes rarely occurs.