Wafer handling clamp WHA series

We design and manufacture products based on customer's specification. Edge clamping for non-contact on the front and back. Please contact us at any time. ■Fixed transfer This product is applicable to numerous areas of application that requires various different handling positions and directions, and which prevents misalignment caused by high-speed operation ■No contact both on the front and back of the wafer This model makes contact with the edges of the workpiece only in order to solve the concern for pad scars caused by clamping and vacuum transfer. ■Clean room compliant types available ■WHA series Single-Side Driven Edge Clamp with Side Arm